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Vol.58, No.1, 26 ~ 32, 2020
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| Title |
| Effect of Surface Roughness on the Formation of Nano-to-Mirco Patterns Using Pattern Transfer Printing |
| 박태완 Tae Wan Park , 변명환 Myunghwan Byun , 정현성 Hyunsung Jung , 박운익 Woon Ik Park |
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| Abstract |
| The ability to form high quality nano-/micro- patterns is very important for the nanofabrication of high-density electronic devices. However, remaining challenges have yet to be resolved, including low quality roughness, low pattern resolution, and the highly complex process. In this study, we suggest a novel and simple method for creating high quality patterns, controlling the surface roughness of the target substrates with a polishing process. We systematically investigated the effect of surface roughness on pattern generation, using a nanotransfer printing (nTP) process on target Al2O3 substrates. We successfully formed highly ordered nanoscale functional patterns on well-defined surfaces, using a mirror-polishing process, compared to normally-polished substrates. In addition, we demonstrated well-printed Sn nanopatterns on various metal (Cu and Fe) substrates. Close-up scanning electron microscope (SEM) images clearly show welldefined patterns on the mirror-polished substrates. Based on these results, we expect that by mechanically modifying substrate surfaces, the yield and quality of pattern formation can be improved, and that this approach can be extended to other patterning methods.
(Received October 17, 2019; Accepted November 26, 2019) |
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| Key Words |
| surface modification, polishing, nanotransfer printing |
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