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Vol.52, No.2, 155 ~ 162, 2014
Title
Characteristics of ZnO Thin Film Transistors Fabricated Using a Microwave Sol-Gel Method
Kyong Min Kim , Eun Kyeom Kim , Young Ill Kim , Kyoung Wan Park
Abstract
We synthesized a gel-like phase of zinc oxide (ZnO) by employing a microwave-assisted technique and then used this gel-like phase to fabricate ZnO thin film transistors (TFTs). By utilizing this method, we were able to prepare the ZnO gel-like phase in a relatively short time and obtained polycrystalline ZnO thin films. This microwave-assisted technique also allows the use of low-temperature thermal processes in the fabrication of ZnO-TFTs. The bottom-gate TFTs with a ZnO layer as the active channel exhibited a field effect mobility of 0.6 cm2/V·s, a sub-threshold slope of 9 V/decade, and an on/off current ratio greater than 104. These results point to the possibility of using microwave-assisted techniques for transparent and flexible electronic devices based on ZnO. †(Received July 16, 2013)
Key Words
ZnO, semiconductors, sol-gel, electrical properties, TEM
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