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Vol.51, No.2, 145 ~ 150, 2013
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| Title |
| Electrical Degradation of Al-doped ZnO Thin Films by a Damp Heat Test |
| Eui Jong Lee , Tai Min Noh , Min Seok Jeon , Young Keun Jeong , Hee Soo Lee |
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| Abstract |
| The degradation behavior of AZO thin films against thermal and humidity stress was examined by a damp heat test. The resistivity of all films tested under various conditions increased due to the decreased carrier concentration and mobility with elapsed damp heat test time. The resistivity of the films also increased with increasing humidity, and these results indicated that the resistivity of AZO films had a stronger dependence on humidity than on temperature. Among the tested samples, the AZO films at 85℃/85% relative humidity conditions highly degraded, indicating that additional -OH bonds may deteriorate the properties of ZnO thin films. The degradation of the AZO films under the damp heat test is attributed to chemisorption and diffusion of water vapors, and the AZO reacts with the water molecules and is then transformed into insulating Zn(OH)2. |
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| Key Words |
| AZO(Al doped ZnO) thin film, degradation, damp heat test, chemisorption, electrical property |
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