| Yttria stabilized zirconia(YSZ) thin film electrolyte for solid oxide fuel cells(SOFCS) was reactively deposited by RF sputtering and its mechanical and electrical propertiea were characterized. Deposition rate of 8 ㏖% YSZ thin film was about 100Å/min under the sputtering conditions of 14% of oxygen flow ratio and 6.6 W/㎠ of RF power density. Furthermore, surface roughness of YSZ thin films increased with increasing yttria content in the films and fine grain-like particles were considerably appeared, especially, in 8 ㏖% YSZ thin film. It was thought that these fine grain-like particles were caused by un-resolved yttria and that these were considerably reduced by post-annealing at 500℃ for 1 hr. The electrical conductivity of a triple layered 8 ㏖% YSZ/3 ㏖% YSZ/8% ㏖% YSZ thin film stack at 900℃ was slightly lower than that of a single layered 8 ㏖% YSZ thin film which was most widely used solid electrolytes for SOFCs. However, the triple layered 8 ㏖% YSZ/3 ㏖% YSZ/8㏖ % YSZ thin film had lower compress stress and better microhardness than 8 ㏖% YSZ thin firms, exhibiting a possibility of application to SOFCs. |
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