A Study on the Active Species and the Nitride Layer Formation Behavior by means of Optical Emission Spectroscopy During the Plasma Nitriding of Steels
정봉용Bong Yong Jeong,김명호Myung Ho Kim
Abstract
In order to characterize the behavior of active species during the pulse plasma nitriding process, OES(optical emission spectroscopy) measurements were performed for various gas compositions, treatment temperatures, duty factors ratios and different gas pressures in the reactor. Results of the OES measurements were compared to those of the metallurgical analysis of plasma nitrided sintered steel and high speed steel substrates. It was found that the spectral intensities of N^+₂ and N₂ were influenced by treatment parameters and the thickness of nitride layer and size of micro-pore increased with increasing the temperature and pulse ratio. Especially, the compound layer was mainly influenced by gas pressure.