발간논문

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Vol.48, No.2, 163 ~ 169, 2010
Title
Laser-Direct Patterning of Nanostructured Metal Thin Films
신현권 Hyun Kwon Shin , 이형재 Hyeong Jae Lee , 유형근 Hyeong Geun Yoo , 임기수 Ki Soo Lim , 이명규 Myeong Kyu Lee
Abstract
We here describe the laser-direct patterning of nanostructured metal thin films. This method involves light-matter interaction in which a pulsed laser beam impinging on the film generates a thermoelastic force that plays a role to detach the film from the substrate or underlying layers. A moderate cohesion of the nanostructured film enables localized desorption of the material upon irradiation by a spatially-modulated laser beam, giving good fidelity with the transfered pattern. This photoresist-free process provides a simple high-resolution scheme for patterning metal thin films.
Key Words
thin films, metals, nanostructured materials, scanning electron microscopy, microstructurds
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