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Vol.47, No.1, 44 ~ 50, 2009
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| Title |
| Optically Transparent ITO Film and the Fabrication of Plasma Signboard |
| 조영제 Young Je Jo , 김재관 Jae Kwan Kim , 한승철 Seung Cheol Han , 곽준섭 Joon Seop Kwak , 이지면 Ji Myon Lee |
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| Abstract |
| Indium tin oxide(ITO) thin films were deposited on the glass substrates by radio-frequency (RF) magnetron sputtering method. The influence of rapid thermal annealing (RTA) treatment on the optical and electrical properties of the films were investigated for the purpose of fabricating plasma display signboard. Structural properties, surface roughness, sheet resistance and transmittance of the ITO film were analysed by using x-ray diffraction method, atomic force microscopy (AFM), four point prove, and ultraviolet-visible spectrometer, respectively. It was found that the RTA treatment increased the transmittance and decreased the resistivity of the ITO film, respectively. Furthermore, we successfully demonstrated the direct-current plasma signboard by using ITO electrode and phosphors. |
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| Key Words |
| ITO, TCO, plasma signboard |
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