발간논문

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Vol.37, No.8, 987 ~ 992, 1999
Title
Structural Analysis of Magnetron Sputtered NiFe/Ag Multilayers
서유석Yoo Suk Shu,이성래Seong Rae Lee
Abstract
The structural characteristics of NiFe/Ag multilayers prepared by magnetron sputtering were studied. For the quantitative structural analysis of the multilayers, we used XRD simulation based on a superlattice structural model considering gaussian fluctuations in the thickness of each layer and interface. Because of large lattice mismatch and large surface energy difference in the NiFe/Ag multilayer system, it is difficult to fabricate good uniform multilayer. Among the deposition parameters, the sputtering gas(Ar/H₂) was the most effective to enhance the uniformity of the multilayers. As the period of the multilayer increased, the uniformity of the multiayer was improved.
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