| Abstract |
| ITO/Ag/ITO multilayer thin films on PET and coming 1737 glass were prepared by D.C. magnetron reactive sputtering method. Ag layer was inserted for applying ITO to a flexible substrate at low temperature or room temperature. The crystallinity and the electrical-optical property of ITO/Ag/ITO thin films were investigated. ITO/Ag/ITG thin films were at room temperature and grew to be crystalline with (400) preferred plane as the substrate temperature increased. ITO/Ag/ITO thin films on PET showed the transmittance of above 80% when the thickness of Ag was 5 nm. The carrier concentration increased more than 10 times due to the effect layer, and the resistance was below 15 Ω/□ much lower than that of ITO thin film without As the deposition temperature increased, Ag oxide was formed at the boundary between ITO and is supposed to be a disturbing factor for the motion of electrical charge. |
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| Key Words |
| ITO thin film, microstructure, multilayer, transmittance, sheet resistance |
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