| Abstract |
| CrSiN coatings of stepwise changing Si concentration were deposited on stainless steel by unbalanced magnetron sputtering (UBMS) system. Microstructure of the films due to the Si concentration is measured by XRD. The corrosion behavior of CrSiN coatings in deaerated 3.5% XaCl solution was investigated by electrochemical impedance spectroscopy (EIS). EIS measurements showed that the corrosion resistance of Si-bearing CrN was improved by phase transformation of the film, which leads to increase of charge transfer resistance. The microstructure of CrSiN film depends on the Si concentration. At the Si/ (Cr + Si) ratio of 9.8, the Si-bearing CrN possesses the best corrosion resistance due to the phase transformation and the decrease in grain size. |
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