Corrosion-Wear Behaviors of Si-Incorporated Diamond-Like Carbon Coatings Deposited on STS 316L for Artificial Hip Joints
김우중 Woo Jung Kim , 김호건 Ho Gun Kim , 김정구 Jung Gu Kim , 박세준 Se Jun Park , 이광렬 Kwang Ryeol Lee
Abstract
Si incorporated diamond-like carbon (Si-DLC) films ranging from 0 to 2 at.% contents were deposited on STS 316L substrates for orthopedic implants by means of r.f. plasma-assisted chemical vapor deposition (r.f. PACVD) technique, using mixtures of benzene (C6H6) and silane (SiH4) as the precursor gases. This study provides the reliable and quantitative data for assessment of the effect of Si incorporation on wear-corrosion properties in the simulated body fluid environment through the tribological and electrochemical test. It was found that wear and corrosion to resistance of Si-DLC coatings with increasing Si content were improved owing to high Sp³ bonding.