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Vol.43, No.2, 142 ~ 148, 2005
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| Title |
| Fabrication of PCR Device for Heating/Cooling |
| 류근걸 Kun Kul Ryoo , 김우혁 Woo Hyuk Kim , 김영근 Young Geun Kim , 이미영 Mi Young Lee , 이윤배 Youn Bae Lee |
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| Abstract |
| Introducing the general MEMS (Micro Electro Mechanical System) technology to BioMEMS (Biological MEMS) field, PCR (Polymerase Chain Reaction) micro-device, which is for DNA multiplication and analysis, is designed and fabricated in this study. PCR micro-device is characteristic of the accurate reaction and temperature control, and the thermal uniformity. Silicon wafer suitable for these requirements was utilized for 20x20 mm²PCR micro-device fabrication. Gold film of 50 μm line width was developed to optimize the power of 200 Ω resistance heater. Reaction chamber of 8x8 mm²size was fabricated by chemical wet etch, together with a cooling line of 0.35 mm width which circulates the reaction chamber periphery twice. PDMS (Polydimethylsioxane) film was utilized to cover the reaction chamber and the cooling line. Computer simulation was carried out to predict the behavior of temperature changes in the fabricated PCR micro-device. Heating 60 seconds resulted in 84-88℃ temperature profile in the reaction chamber, and then 30 seconds cooling was enough to reach to 55℃. It was recognized that this condition was acceptable to PCR multiplication operation. (Received March 29, 2004) |
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| Key Words |
| BioMEMS, PCR device, Reaction chamber, Computer simulation |
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