발간논문

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Vol.42, No.6, 494 ~ 501, 2004
Title
Mathematical Modeling ; The Effect of Auxiliary Electrodes on Uniformity of Electrodeposit
정순효 Soon Hyo Chung , 오영주 Young Joo Oh
Abstract
A numerical simulation based on the finite element method is used to investigate the effect of auxiliary electrode on the uniformity of deposition rate at a patterned electrode. The calculated deposition rates agreed well with the measured ones. Influences of the width of auxiliary electrode, gap between cathode and auxiliary electrode, distance between the inner wall of bath and auxiliary electrode and shape of auxiliary electrode on uniformity of electrodeposit have been studied. The optimum geometric factor of auxiliary electrode was obtained. (Received January 2, 2004)
Key Words
Electrodeposition, Uniformity of current distribution, Auxiliary electrode
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