발간논문

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Vol.36, No.9, 1435 ~ 1444, 1998
Title
Elastic Modulus Measurement of Multilayer Metallic Thin Films
조기현 , 김영만 Ki Hyun Cho , Young Man Kim
Abstract
Two and three layer composite models were developed using a beam vibration theory and the models were applied for measuring the Young`s moduli of thin metallic films. Two-layer composite of Cr(or Ni, Co/Si(111)) and three-layer composite of (Cr/Ti/Si(111)) were prepared by RF magnetron sputtering and used to test the developed models. The Young`s moduli of (Cr)films obtained by three-layer composite model agree well with those of (Cr)films obtained by two-layer composite model considering (Ti/Si) as one layer and (Cr) as the other layer. This suggests that moduli of multilayer films may be obtained by using a two-layer composite model repeatedly.
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