발간논문

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Vol.41, No.9, 600 ~ 606, 2003
Title
Electronic Magnetic & Optical Materials ; Growth of SiC Nanorod using Single Precursor
노대호 No Dae Ho , 김재수 Kim Jae Su , 변동진 Byeon Dong Jin , 양재웅 Yang Jae Ung , 김나리 Kim Na Li
Abstract
SiC nanorod has been synthesized directly on Si using CVD method. Ni was used for liquid catalyst during growth, and HMDS was used for source materials. Growth temperature and time effected grown nanorod’s diameter by growth rate. Deactivation was occurred at high source gas concentration. From the cross-sectional SEM image, SiC nanorod growth was divided two regions because of lateral VS growth effect. SiC nanorod was grown with uniaxial direction and highly crystalline phase.
Key Words
SiC nanorod, HMDS, CVD, Ni
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