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Vol.41, No.9, 594 ~ 600, 2003
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| Title |
| Electronic Magnetic & Optical Materials ; Effective Transverse Piezoelectric Coefficients (e31,f) of Thick Pb(Zr0.52, Ti0.48)O3 Films Fabricated by Chemical Solution Deposition Process |
| 박준식 Park Jun Sig , 양성준 Yang Seong Jun , 강성군 Kang Seong Gun , 나경환 Na Gyeong Hwan |
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| Abstract |
| Thick Pb(Zr_(0.52), Ti_(0.48))O₃(briefly, PZT) films are required for the cases of micro actuators and sensors with high driving force, high breakdown voltage and high sensitivity, and so on. In this work, thick PZT films were fabricated by chemical solution deposition process. Total 16 types of samples using thick PZT films with thicknesses, about 1 ㎛ and 2 ㎛, and Pt top electrodes shapes for measuring effective transverse piezoelectric coefficients (e_(31,f)) were prepared using MEMS processes. All samples were characterized by fabricated e_(31,f) measurement system before and after poling process at 125 kV/cm and 150℃ for 10 min. |e_(31,f)| values of samples after poling were higher than samples before poling. Those of 2 ㎛ thick PZT films were also higher than 1 ㎛ thick PZT films. We found that |e_(31,f)| was directly related with {111} to {h00} crystal structures of thick PZT films. And those with narrow electrodes (x₁- x_(0)) as top Pt electrodes were also higher than cases with wide top Pt electrodes in agreement with given equation. |
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| Key Words |
| Thick PZT film, Transverse piezoelectric coefficient, Sol-Gel, Poling process |
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