| TiO2 photocatalyst with powerful oxidization ability can clean up various environmental pollutions. TiO2 thin films were made to investigate the surface morphology, phase analysis and photocatalytic efficiency. TiO2 thin films were prepared on the Si wafer under various conditions(oxygen partial pressure, working pressrue, D.C. power) by the reactive sputtering process. TiO2 thin films were investigated using XRD, α-step, AFM and a standard plate count method. The deposition rate of TiO2 thin films depended on the particle scattering effect. The surface morphologies of TiO2 thin films showed a columnar structure. The TiO2 films with a good columnar structure were obtained at the optimum processing condition. The Escherichia coli. experiment showed that the excellent crystallinity and the high roughness surface improved the photocatalytic efficiency of TiO2 thin films. The highest efficiency on the bactericidal ability was 78% under UV irradiation. The wetting angle of a water droplet on TiO2 thin films changed from 75˚ to 5˚ under UV light. |
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