| Microstructure and mechanical properties of TiAlN thin films, deposited on quenched and tempered STD61 tool steel by Arc Ion Plating, were studied using XRD, XPS, hardness, adhesion and wear tester. From the results of XPS analysis, chemical binding energy of Ti, Al and N was proportional to Al contents. The TiAlN film was grown with the (200) orientation. As the Al content in the thin film increased, the hardness increased and the grain refined, but the adhesion of thin film decreased because of the increase of compression stress due to excess of limit Al content. The wear resistance of TiAlN film increased with increasing of Al contents. But, when the Al contents exceed, the thin film did not tolerate the continuous wear load and then the fracture occured because of the high internal stress of the thin film. |
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