발간논문

Home > KJMM 논문 > 발간논문

Vol.40, No.5, 537 ~ 545, 2002
Title
Electronic , Magnetic & Optical Materials / Fabrication of the Nickel Microstructure Using UV-LIGA
이장훈Jang Hoon Lee,김대룡Dai Ryong Kim
Abstract
In this study, SU-8 micro-molds and nickel microstructure were fabricated by UV-LIGA process. The optimum conditions for the fabrication of SU-8 micro-mold and the nickel electroforming were investigated. The 150 ㎛-thick SU-8 micro-mold was successfully fabricated through the process conditions. It was observed during electroforming that with increasing of concentration of wetting agent, the current efficiency was increased and declination of nickel microstructure thickness with change of aspect ratio was decreased. This is attributed that when adding wetting agent in electrolyte, contact angle between SU-8 micro-mold and electrolyte is decreased and penetration of electrolyte into microchannel is increased. The thickness uniformity of nickel microstructure was improved by adding wetting agent because of the improvement of secondary current density distribution.
Key Words
| PDF
대한금속∙재료학회 │ (06633) 서울시 서초구 서초대로 56길 38 대한금속∙재료학회 회관 (서초1동 1666-12번지)
Tel : 070-4266-1646 │ FAX : 02-557-1080 │ E-mail : metal@kim.or.kr
Copyright ⓒ 2013 사단법인 대한금속∙재료학회 All rights reserved.