발간논문

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Vol.38, No.3, 500 ~ 504, 2000
Title
Pesearch Paper / Electronic , Magnetic & Optical Matrials : Effect of Electric Field on Metal - Induced Lateral Crystallization of Amorphous Silicon Thin Films
김창훈Chang Hoon Kim,이병일Byung Il Lee,주승기Seung Ki Joo
Abstract
Amorphous silicon was crystallized by metal induced lateral crystallization(MILC) in an electric field. A 50 Å Ni layer on a-Si was used for the crystallization and 3000 Å Pt layers for the electrodes. In a DC electric field over 200 V/㎝, MILC rate of a-Si with negative polarity increased and with positive polarity decreased. In an AC electric field over 2200 V/㎝, MILC rate increased and this phenomenon can be explained by Joule heating effect.
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