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Vol.38, No.2, 346 ~ 352, 2000
Title
Pesearch Paper / Surface Treatment : Synthesis of Austenitic Stainless Steel Film Using a High - Rate Magnetron Sputtering Process
김광석G . S . Kim,이상율S . Y . Lee,한상묵S . M .Han,이종훈J . H . Lee
Abstract
High-rate unbalanced magnetron sputtering process was employed to deposit a STS304 stainless steel film on S45C steel. The deposition of stainless steel film was carried out at a pressure of 2×10^(-3) torr, various target power densities, substrate bias voltages and distances of target-to-substrate. Deposition rate of the STS304 stainless steel films up to 1.3㎛/min could be obtained, but it decreased more rapidly by increasing target-to-substrate distance than by decreasing ion current. The results from XRD and EDS analysis showed that unbalanced magnetron sputtering of stainless steel target could successfully transfer the multi-element composition of the bulk material to the coating without any dramatic stoichiometric variation. SEM observation of STS304 film indicated that the structure of the film was a columnar structure(zone T structure) with a fine grain size. The Knoop hardness of coated STS304 film was measured to be approximately H_k800∼850 and this high value could be attributed to the fine grain size of the film and the residual compress stress on the film. The corrosion property of the film was evaluated using salt spray test and the results indicated that the corrosion property of stainless steel coated S45C steel was similar to that of the electroplated Cr coated S45C steel.
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