발간논문

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Vol.38, No.1, 148 ~ 153, 2000
Title
Pesearch Paper / Electronic , Magnetic & Optical Matrials : A Study on the Formation of Large Single Grains in PZT Thin Films by PZT seed
이장식Jang Sik Lee,박응철Eung Chul Park,박정호Jung Ho Park,이병일Byung Il Lee,주승기Seung Ki Joo
Abstract
Selective nucleation and lateral growing method have been developed for high quality ferroelectric PZT(65/35) thin films using perovskite-phase PZT island seed. The PZT films on PZT seed island transformed into perovskite-phase at temperature as low as 540℃, which temperature is lower than 150℃ compared to that of the PZT thin films deposited on Pt films. The temperature difference enables the lateral growth without undesirable random nucleation. Maximum grain sizes of the perovskite-phase PZT films are determined by annealing temperature. The PZT thin films show leakage current density of 8×10^(-8) A/㎠, breakdown field of 1240 kV/㎝, saturation polarization of 42μC/㎠, and remanent polarization of 30μC/㎠, which values are maintained up to 2×10^11 cycles.
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