A Study on the Fabrication and Electrochemical Characterization of Lithium Thin-Film Batteries using Vanadium-Tungsten Oxide Thin Films
박영신 , 이병일 , 주승기 Young Sin Park , Byung Il Lee , Seung Ki Joo
Abstract
Thin-film rechargeable lithium batteries with amorphous vanadium tungsten oxide cathodes were fabricated. The vanadium tungsten oxide thin films were formed by RF magnetron sputtering and the effects of tungsten addition on the crystallinity and on the electrochemical behavior were investigated. According to X-ray analysis, it turned out that vanadium oxide films became amorphized by tungsten addition. When the tungsten was added to the V₂O_5 films, cycling reversibility was considerably improved. Electrochemical test showed that the cell capacity was about 70μ Ah/㎠· ㎛ when the amount of tungsten added in the film reached 30 atomic percent. No appreciable degradation of the cell capacity could be observed after one hundred cycles. All solid state thin-film batteries were fabricated with cell structure of Li/LiPON/V-W-O by sequential deposition.