발간논문

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Vol.35, No.5, 639 ~ 645, 1997
Title
A Study on the Fabrication of Lithium Thin-Film Batteries with Lithium-Manganese Oxide Thin Films
박영신 , 이세희 , 이병일 , 주승기 Young Sin Park , Se Hee Lee , Byung Il Lee , Seung Ki Joo
Abstract
Thin-film rechargeable lithium batteries with LiMn₂O₄ cathodes were fabricated. The lithium manganese oxide thin films were deposited by RF magnetron sputtering and spinel structure was formed by rapid thermal annealing (RTA) in an oxygen ambient. The as-deposited films turned out to be amorphous, and could be crystallized into a spinel structure by RTA above 650℃. LiMn₂O₄ spinel films prepared at 750℃ showed good rechargeability and fast lithium intercalation kinetics. All solid state thin-film batteries were fabricated with cell structure of Li/LiPON/LiMn₂O₄, by sequential deposition. Room temperature cycling of this cell showed a nealy constant cell potential of 4V and good rechargeability.
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