The effect of stacking conditions on optical properties of TiO₂, Ag, and TiO₂/Ag/TiO₂ multilayer has been examined for the applications of transparent heat-mirror. At PO₂/P_(Ar)≥-0.2, TiO₂films(180A˚) showed 90%(γ=550 ㎚) visible range transmittance, which decreased as thickness increased. High transmittance(T_(max)=80% at 324 ㎚) of Ag films was observed at the thickness of 120∼180 A˚. Due to the diffusion of Ag, TiO₂/Ag/TiO₂ stacks showed poor IR reflectivity. After insertion of Ti(40A˚) as diffusion barrier, the TiO₂/Ti/Ag/Ti/TiO₂stacks showed good spectral selectivity as transparent heat-mirror with 89%(γ=410 ㎚) visible transmittancy and 77%(γ=820 ㎚) IR reflectancy. |
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