발간논문

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Vol.33, No.5, 585 ~ 591, 1995
Title
Structural Properties of Co - Evaporated Cu - Co Nano - Granular Alloy Films
이성래Seong Rae Lee, 오용주Yong Ju Oh, 김용혁Yong Hyuk Kim
Abstract
Structural characteristics as functions of Co composition and aging temperatures were investigated in the Cu-Co alloy films deposited by the thermal co-evaporation. In the low Co concentration(<25at.%), the as-deposited alloy fillms were mainly oversaturated solid solutions and in the higher concentration, they were the mixtures of oversaturated solid solutions with Co-rich particles. As the aging temperature increases, Co precipitated as fcc α-Co and the precipitation was enhanced in the higher supersaturated alloy films with the Co-rich particles. The existance of α-Co precipitates was thought to be due to the low lattice misfit strain energy and the supercooling effect. The cored structure which was composed of the low Co content outer layer and the high Co content core was developed due to diffusion of precipitated Co back into the Cu when the aging temperature increased from 500℃ to higher temperature. The measured average diameters of Co particles aged from at 400 to 650℃ for 10min. were range from about 130 to 190Å for 25at.%Co alloy film.
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