발간논문

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Vol.33, No.3, 332 ~ 340, 1995
Title
Adhesion , Hardness and Wear resistance of the Sputtered ZrN Coating with Ni Interlayer
예길촌Gil Chon Ye, 신현준Hyue Jun Shin, 권식철Sik Chol Kwon, 백운승Woon Seung Baek
Abstract
ZrN coatings were deposited on tool steel(SKH9) with the interlayer of Ni by a reactive D.C. magnetron sputtering. The microhardness, adhesion strength and wear-resistance of the films were investigated with microhardness tester, scratch tester, pin-on-disk method respectively. ZrN coatings were deposited with the condition of partial pressures of N2 gas(4∼10x10-4mbar) and the substrate bias voltage(0∼250V). The microhardness decreased from HV 1050 ㎏/㎜2 to HV 1000㎏/㎜2 as the thickness of Ni interlayer increased from 0.2 ㎛ to 1.3 ㎛. The adhesion strength of the Ni/ZrN double-layered coatings were 22N in the scratch test and it was four times higher than that of ZrN mono-layered coatings. The failure mode of the double-layered coatings was changed from the cohesive at the initial stage to the adhesive failure in the later stage of the failure. The wear-resistance of the Ni/ZrN double-layered coatings increased nearly twice as high as that of the ZrN mono-layered coatings.
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