발간논문

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Vol.32, No.12, 1494 ~ 1499, 1994
Title
Effects of Preparation Conditions on the Optical Band Gap of PECVD - DLC Thin Films
김한 , 주승기 Han Kim , Seung Ki Joo
Abstract
DLC(Diamondlike carbon) thin films were obtained by PECVD(Plasma Enhanced Chemical Vapor Deposition) with CH₄ gas as a source gas and effects of preparation conditions on the optical band gap were studied. In case of PECVD of DLC thin films, it turned out that chemical vapor deposition and sputtering by physical collisions of reactive ion species occured simultaneously during deposition and thus the hydrogen concentration in the DLC thin films, which is known to influence directly on the optical band gap could be controlled by changing the energy of reactive ion species in the plasma. It was possible in this work to obtain different optical band gap of DLC thin films from 2.2eV to 0.6eV and make suitable explanations about the relationship between preparation conditions and optical band gap.
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