Structural Characterization of Rare Earth - Transition Metal Amorphous thin Films
김찬욱Chan Wook Kim, 칠미 진Susumu Nanao
Abstract
The atomic structures of RF magnetron sputtered amorphous Fe_(80)Tb_(20), Co_(75)Tb_(25) and Fe_(58)Co_(15)Tb_(27) films with 1㎛ thickness have been investigated by X-ray diffraction measurements in a low-angle geometry. Atomic number density functions of Fe-Tb and Co-Tb alloy systems show that the inter-atomic distance for the Co-Tb pair is 0.25Å shorter than that for the Fe-Tb pair but the structural difference in the topology between tho two alloy systems has not been observed. The local structures of amorphous Fe-Tb and Co-Tb systems are identified similar to those of the crystalline Fe_(23)Tb_6 and Co₃Tb, respectively. The local structure of amorphous Fe-Co-Tb system appears to be the weighted average structure of amorphous Fe-Tb and Co-Tb alloy systems according to the compositional ratio of Fe and Co atoms.