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Vol.32, No.3, 344 ~ 351, 1994
Title
Effect of AIN Dielectric layer on the Magneto - Optical Properties of Co / Pd Artificial Superlattices
오훈상Hoon Sang Oh, 주승기Seung Ki Joo
Abstract
Co/Pd artificial superlattices with a bi-layer and a quadri-layer structure combined with reactively sputtered AlN were fabricated by RF magnetron sputtering and the magnetic and magnetooptical properties were investigated. Kerr rotation angle of Co/Pd multilayer without any dielectric layers was 0.15˚ at 780㎚, but the optimized quadri-layer structure Co/Pd multilayer combined with AlN anti-reflection layer, phase-layer and Al reflector showed 1.9˚ so FOM(Figure Of Merit) was 9 times larger than that of bare Co/Pd film. It turned out that the coercivity of Co/Pd multilayer increased as AIN underlayer thickness increased, which is due to an enhancement of the perpendicular magnetic anisotropy energy of Co/Pd artificial superlattices in case of increasing AIN underlayer thickness.
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