발간논문

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Vol.31, No.12, 1526 ~ 1533, 1993
Title
Thermal Behavior of PECVD Diamondlike Carbon Thin Films Fabricated with a Low Discharging Frequency
김한Han Kim, 주승기Seung Ki Joo
Abstract
Diamondlike carbon films were fabricated by PECVD with a low discharging frequency and effects of heat treatment on the C-H bonding states as well as the microhardness were investigated. It turned out that the discharging frequency has a considerable effect on the thermal stability of DLC thin films. DLC films fabricatd with 450 kHz discharging frequency did not show any delamination from the silicon substrate even after annealing at 900℃ and the microhardness of the films showed less sensitivity to temperature than the DLC films with 13.56MHz discharging frequency. Improvements on the thermal stability were attributed to the C-H bonding states of such films, which is related to the energy of depositing species in PECVD.
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