The structure of Pd/Co multilayer thin films prepared by thermal evaporation was analyzed, compared with the theoretical calculation based on the ideal superlattice structure. The FWHM(Full Width at Half Maximum) of the diffracted peaks for the multilayer films was larger than that of the ideal superlattice, and it was largely affected by the fluctuation of the period of the multilayer film. The fluctuation increased with the period of the film and the lattice mismatch between two sublayers. As increasing the period, the coherent length of superlattice structure was decreased. The observation of the satellite peaks was difficult when the films had small period(Δ$lt;15Å) because the intensity of the structure factor at the satellite peak position is much smaller than that at the main peak position. The Pd underlayer reduced the disorders in the film and therefore the coherence length of the superstructure was increased.