발간논문

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Vol.31, No.8, 1004 ~ 1014, 1993
Title
A thermodynamical Study on the Phase Formation and Sequence by Ion Beam Mixing In Al / Cr System
최정동Jeong Dong Choi, 곽준섭Joon Seop Kwak, 홍진석Jin Seok Hong, 지응준Eung Joon Chi, 박상욱Sang Wook Park, 백홍구Hong Koo Baik, 채근화Keun Hwa Chae, 정성문Sung Mun Jung, 황정남Chung Nam Whang
Abstract
Evaporated Al/Cr thin films were irradiated with various doses to produce intermetallic compounds. In order to study the first phase formation and phase sequence, RBS, XRD and TEM studies have been used. RBS analysis shows that intermixing has occurred across the Al/Cr interface and mixing variance increases with increasing ion dose. The Al_(13)Cr₂ phase is formed as an initial phase by ion beam mixing and then transforms into the Al_(11)Cr₂ or Al₄Cr phases at subsequent ion bomdardment. This phenomenon is discussed in terms of the enhanced atomic mobility and the thermodynamical driving force by introducing the effective heat of formation(ΔH) model. The experimental results agree with that predicted by effective heat of formation model. It has been studied the first phase formation and phase sequence by Ion Beam Mixing in metal/Si systems as well as metal/metal systems.
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