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Vol.31, No.1, 32 ~ 39, 1993

Title

Effects of DC Self Bias and Secondary Gas on the Optical Properties of Diamondlike Carbon Thin films Prepared by PECVD

김한Han Kim, 황인오In Oh Hwang, 주승기Sung Ki Joo

Abstract

Diamondlike carbon thin films were prepared on Si (001) wafer by plasma enhanced chemical vapor deposition and we observed the variation of the optical band gap of DLC thin films with respect to deposition condition. The change of the optical band gap of the DLC thin films was investigated as a function of DC self bias which was the most important variable in PECVD and the secondary gas. When DC self bias was applied, the optical band gap decreased monotonously and when DC self bias was not applied, the degree of the change of the optical band gap decreased greatly. The change of the optical band gap had a close relation with the concentration of C-H bond in DLC thin films and the content of hydrogen decreased with the increase of DC self bias and we could verify these results by using FT-IR spectroscopy. And, It was seen that nitrogen and hydrogen gas used for secondary gas had a role of increasing the decreasing rate of the optical band gap by the breakage of C-H bond of DLC thin films during the deposition.

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