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Vol.30, No.1, 119 ~ 121, 1992
Title
Thermodynamic analysis of Diamond Films Synthesized by CVD Method
박순 Soon Park
Abstract
Equilibrium concentrations of various hydrocarbon species which existed in the vapor for growing solid carbon is calculated and a phase diagram for the carbon-hydrogen system is obtained using the thermodynamic quasi-equilibrium model. These calculations show that methane is the sole reaction product at temperatures below 1000℃, acethylene is, however, the dominant hydrocarbon speies above 2000℃. The CVD phase diagram shows that high methane concentrations and low total pressures decrease the lower temperature limit required to obtain any deposit. The fraction of carbon deposited from methane-hydrogen mixtures changes rapidly from practically zero at lower temperature limit to close to 100% over a couple of hundred degrees, then to decrease to zero at higher temperature limit.
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