발간논문

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Vol.29, No.1, 3 ~ 11, 1991
Title
Preparation of Ultra - Fine Mo Powder by CVD method
이갑호Kap Ho Lee, 원창환Chang Whan Won, 천병선Byung Sun Chun
Abstract
To obtain fundamental informations for ultrafine molybdenum powders, the preparatio of molybdenum powders by vapour phase reaction procedures of MoCl_5 with H₂ has been carried out in the temperature range of 500-900℃. The effects of reaction conditions on the reaction rate, specific surface area, particle size and morphology of ultrafine molybdenum powders were investigated by utilizing conductivity meter, BET method, X-ray diffraction, SEM and TEM techniques, respectively. It is apparent that the reaction rate and specific surface area were increased with increasing reaction temperature, H₂ and MoCl_5 gas partial pressure. The size and shape of the reaction products were nearly about 20-30㎚ and spherical, respectively. Especially, the first generated particles were agglomerated each other in chain type.
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