Microstructures of Co -Early Transition metal thin film Alloys
한석희S . H . Han, 김희중H . J . Kim, 천성순J . S . Chun, 강일구I . K . Kang
Abstract
The microstructures of pure Co and Co-transition metal binary alloys made by sputtering have been studied. The film structure of pure Co is the randomly oriented hcp structure. The interplanar spacing of Co-Nb, Co-Ti and Co-Mo alloys continuously increases with increasing the solute concentration, but that of Co-Zr initially increases and does not change from 4 at.% Zr. This trend was interpreted as the difference of solute limit. In Co-Mo alloys, the phenomena which grain size is remarkably increased with decreasing the cooling rate is revealed, and this is discussed as the preferred growth effect of [001] direction perpendicular to the film plane.