발간논문

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Vol.25, No.7, 499 ~ 506, 1987
Title
Texture and Microstructure of Evaporated Ti Thin Films
한봉희Bong Hee Hahn, 권혁록Hyeok Rok Kweor
Abstract
Thin film properties generally vary by orders of magnitude depending upon preparation. In this work the crystallographie structure and the physical structure of evaporated Ti thin films resulting from various experimental conditions were investigated. The evaporated Ti thin Films were characterized by an X-ray technique for the texture, scanning electron microscopy and transmision electron microscopy for the physical structure and Auger electron spectroscopy and X-ray photoelectron spectroscopy for the chemical distribution. When the substrate temperature was below 0.3 Tm, evaporated Ti thin films were found to have very strong (00.2) preferred orientation which was independent of the substrate and the rocking curve value decreased with film thickness. The surface columnar size and the crystal grain size increased with film thickness and substrate temperature. When Ti vapour was activated, the columnar size and the grain size decreased and the columnar shape became rounded.
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