Study on the Alumina Coating of Steel by Chemical Vapor Process
최진일Jean Il Choi, 양훈영Hoon Yung Young
Abstract
Alumina coating on various substrates by chemical vapor deposition process has been investigated with different treating conditions in a vertical reactor. Satisfactory deposition was resulted with H₂/CO₂mole ratio is unit and AlCl₃mole fraction is 0.03. Deposition rate was found to be proportional to the square root of total gas flow rate. Since cromium and nickel act as inactive site for adsorption of reactant gas, deposition rate of iron and carbon steel were superior to that of stainless steels.