| Chemical vapor deposition on the various substrates such as electrolytic iron, carbon steel and stainless steel (STS 304) has been carried out with gaseous mixture of TiCl₄, H₂and N₂in order to study the effect of temperature, composition of reaction gas and gas and gas flow rate on the amount and state of TiN coating. Wear resistance of the TiN coated specimens has also been studied. Better TiN deposition was resulted with gas flow rate of 100/min N₂, 90㎖/min H₂and l.l㎖/hr TiCl₄, and elevated temperature. TiN coated layer of electrolytic iron was superior, followed by carbon steel and stainless steel. Wear resistance of the TiN coated specimens improved markedly, and that of stainless steel was prominent. |
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