발간논문

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Vol.9, No.2, 116 ~ 123, 1971
Title
Chemical Vapor Deposition ( C . V . D )
천성순 John S , Chun
Abstract
Chemical vapor deposition techniques have been applied to refractory metals, ceramics, semiconductors, insulators and conductors. The principles and techniques of chemical vapor deposition reactions for the above materials are reviewed. A new design concept of a high temperature hoop stress measurement apparatus for C.V.D. tungsten and other refractory metal alloys is discussed.
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